◆ Built-in RS232 Ethernet
◆ Parallel IO,SECS I/II (optional)
◆ SEMI Standard S2 approved
◆ Built-in wafer mapping and wafer protrusion detecting.
◆ Easy installation, operation and maintenance.
◆ Open Cassette is available as an optional Adapter.
Model
SF Indexer/SF Opener
Main Frame
Aluminum with Anodizing
Processing Wafer Size with Cassette
200 mm
Wafer Pick-up Windows
44.4~62.6 mm
Wafer Position Z-Axis
±0.1 mm
Stage Position(Programmable)
142.6 mm/166.1 mm
Stage Effective Stroke
272.5 mm/396 mm
Speed
66 mm/s(constant velocity)
Mounting
3 setting holes in base plate/4 setting holes in base plate
Power
DC24 V(±10%),9A (MAX)/7A (MAX)