Air Bearing
Toyo Automation Co,Ltd.
Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. Ultra-high 6-DOF accuracy: inearity, Flatness, Straightness, Orthogonality, Pitch, Yaw and Speed wave.
•The throttling element is directly embedded in the motion interface of the high-precision component
•High rigidity and load capacity
•Simplify machine components
•Use the geometric precision planning of components and special mechanism design methods
•Optimized multi-axis motion accuracy
Long-term performance stability and reliability